JEOL JAMP-7830F AES

AES JEOL JAMP-7830F

FACTS at N4.1 B4-10

Auger Electron Spectroscopy (AES)

Auger Electron Spectroscopy (AES), also known as Scanning Auger Microscopy (SAM), is an analytical technique that uses Auger electrons to determine the chemical composition from the surface of a solid material. The technique allows the detection of all elements except hydrogen and helium, with an average detection limit of 0.1% (atomic).
facts_AES_diagram
  • Acceleration voltage: 0.5–25 keV
  • Probe current: 10 pA–100 nA
  • Electron Gun: Schottky field emission gun
  • Analyzer: Hemispherical analyzer
  • Sensitivity: 420kcps
  • Energy range: 0–3 keV with energy resolution of 0.05-0.8%
  • Maximum spatial resolution: 10 nm for AES (10kV, 1nA) and 4 nm for SEI (25kV, 10 pA)
  • Equipped with micro-beam ion gun for depth profiling
  • Chemical mapping