Thermo Scientiff Quattro S

Environmental SEM Thermo Scientific Quattro S

FACTS at N4.1 B4-10

Environmental SEM Thermo Scientific Quattro S

Dedicated system for SEM investigation of 'wet' and non-conductive samples and for in-situ heating up to 1400 °C.
  • Environmental SEM / Low vacuum mode possible - for samples that cannot be in vacuum mode or with minimal sample preparation e.g. wet samples; non-conductive samples
  • X-ray elemental analysis with both X-ray wavelength and energy dispersive spectroscopy (WDS/EDS)
  • Large chamber for in-situ experiments
  • Large area mapping/montages for secondary and/or backscattered electron imaging
  • 52 pin feed through for biasing work
  • Heating stage for heating experiments up to 1,400 °C
  • Possible imaging of hydrated material e.g. hydrogels
Stage dimensions
  • X,Y dimensions: 110 × 110 mm
  • Motorised Z: 65 mm
  • Tilt: -15° / +90°
  • Max. sample height: clearance 85 mm to eucentric point (10 mm)
  • 500 g in any stage position (up to 2 kg at 0° tilt)
  • 122 mm diameter with full X,Y, rotation (larger samples possible  with limited stage travel or rotation)
 
Electron beam parameters
  • Beam current range: 1 pA to 200 nA
  • Accelerating voltage range: 200 V – 30 kV
  • Landing energy range: 20 eV – 30 keV with optional beam deceleration
  • Magnification: 6 to 2,500,000×
  • Beam deceleration with stage bias from -4000 V to +50 V

Vacuum range
  • High vacuum: < 6x10-4 Pa
  • Low vacuum: up to 200 Pa
  • ESEM: up to 4000 Pa
 
Resolution

High-vacuum imaging

  • 0.8 nm @ 30 kV (STEM)
  • 1.0 nm @ 30 kV (SE)
  • 2.5 nm @ 30 kV (BSE)
  • 3.0 nm @ 1 kV (SE)

  • With beam deceleration mode
  • 3.0 nm @ 1 kV (BD mode* + BSED*)
  • 2.1 nm @ 1 kV (BD mode* + ICD*)
     
  • Low vacuum imaging
  • 1.3 nm @ 30 kV (SE)
  • 2.5 nm @ 30 kV (BSE)
  • 3.0 nm @ 3 kV (SE)

  • ESEM imaging
  • 1.3 nm @ 30 kV (SE)

 

Detectors

Quattro detects up to four signals simultaneously from any combination of the available detectors or detector segments:

• ETD – Everhart-Thornley SE detector
• Low-vacuum SE detector (LVD)
• Gaseous SED (GSED) (used in ESEM mode)
• IR camera for viewing sample in chamber
• Nav-Cam™: In-chamber colour optical camera for sample navigation
• Directional backscatter detector (DBS) – retractable or lens-mounted segmented under-the-lens
• DBS-GAD – Lens-mounted gaseous analytical detector
• In-column detector (ICD) for beam deceleration mode

Attachments/Software:
  • WDS: EDAX TEXS HP: Transition Element X-ray Spectrometer
  • EDS: Octane Elite Silicon Drift Detector
  • MAPS™ for automatic large area acquisition using tiling and stitching; correlative work
  • Software controlled heating stage up to 1,400 degrees celsius

 

 
  • SEM imaging of samples in 'wet' conditions
  • in-situ heating experiments in SEM