Thermionic SEM JEOL JSM-6360
FACTS N4.1 B4-10
SEM for imaging and composition analysis using EDX
It is also equipped with an EDX detector for elemental composition analysis
An SEM equipped with a thermionic electron gun
Resolution: 4.0nm
Accelerating Voltage: 0.5 to 30 kV
Magnification: 50x to 100,000x
Electron source: Thermionic tungsten filament
X-ray Analysis: JEOL JED-2300
Accelerating Voltage: 0.5 to 30 kV
Magnification: 50x to 100,000x
Electron source: Thermionic tungsten filament
X-ray Analysis: JEOL JED-2300
The JSM 6360 is used as an imaging tool.
Secondary electron images of nanospherical oxides