Compact and Dynamically Tunable X-ray Generation Based on Novel Van der Waal Heterostructures

Opportunity

The pervasive influence of digitalisation has revolutionised numerous facets of industry and daily life, leading to a surge in the utilisation of IC devices constructed from a diverse array of materials. This rising demand presents a considerable challenge for non-destructive technologies like X-ray inspection, requiring increased material specificity, enhanced image resolution and superior quality to reveal the failure modes. 

Despite these advancements, the X-ray source itself has remained tethered to the iodide source for over fifty years. The emergence of compact or desktop-sized X-ray sources has yet to materialise, hampering further technological progress in this domain. 

This invention provides a new approach for X-ray generation using free electron-driven van der Waals heterostructures. Its benefits include compact, desk-top size, convenient electronically-controlled real-time tunability, and a wide range of tunable multi-colour (photon energy/wavelength) X-ray sources. Experimental validation includes the demonstration of four different X-ray colours (photon energies). 

The technology owner is seeking partners in various domain of X-ray imaging, including X-ray inspection, NDT using XPS, IC chip NDT, failure analysis and material analysis.

Technology

The invention relates to the apparatus and methods for tunable X-ray generation via the interaction of free electrons with periodic structures. By targeting certain crystalline materials bombarded by high-energy free electrons, X-rays of different colours/photon energies can be generated. These materials belong to a new class exhibiting van der Waals heterostructures.

Applications & Advantages

Applications: 

• Selective layering inspection/imaging of IC chips with multiple materials for possible failure analysis/ quality screening.
• Industrial X-ray generation,  imaging and inspection.
• Bioimaging application 

Advantages: 

• Dynamically, real-time tunability of wavelength/photon energy of X-ray generation, enable simultaneous multiple material inspection.
• Desktop and compact, desktop module.
• Low cost for overall cost-of-ownership.