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Introduction
The objective of this course is to study the process development and integration related to lithography processing and technologies which are essential in advanced manufacturing.
- Graduate Certificate in Electronics
- Graduate Certificate in Engineering Optics and Photonics
- FlexiMasters in
Electronics
- FlexiMasters in Engineering Optics and Photonics
Download Learning Pathway e-Guide
At the end of the course, learners are able to:
1. Expose to state-of-the-art advanced CMOS process technologies;
2. Explain the concepts of photolithography and determine the resolution of lithographic systems;
3. Describe the types of photoresists used in wafer manufacturing;
4. Discuss the optical enhancement techniques of sub-wavelength lithography and;
5. Explore alternatives of advanced lithography and the challenges involved in introducing each alternative into production.
Introduction to Semiconductor Processing
Lithography Processing
- Basic Concepts for Photolithography
- Process Overview
- Negative and
Positive Lithography
- Critical Dimension Generation
- Light Spectrum
- Eight
Basic Steps of Photolithography Process
Lithography Technology
- Purpose of Lithography, Resolution and its Critical Parameters
- Photolithograph Equipment
- Reticles and Photomasks
Resist Technology
- Purposed of Photoresist
- Components of Photoresist
- Metrics of Photoresist
- Deep UV Resists
Advanced Lithography
- Optical Resolution Enhancement Techniques for Sub-wavelength
Lithography
- Immersion UV Lithography
- X-Ray Lithography
- E-beam
Lithography
- Extreme UV Lithography
- Nano-imprint Lithography
For graduates, practicing engineers, R&D managers and technical staff who wish to gain in-depth technical knowledge in the area of semiconductor manufacture and microelectronics.
Standard Course Fee: S$1,635
SSG Funding Support | Course fee | Course fee payable after SSG funding, if eligible under various schemes | |
BEFORE funding & GST | AFTER funding & 9% GST | ||
Singapore Citizens (SCs) and Permanent Residents (PRs) (Up to 70% funding) | S$1,500 | S$490.50 | |
Enhanced Training Support for SMEs (ETSS) | S$190.50 | ||
SCs aged ≥ 40 years old | |||
- Standard course fee is inclusive of GST.
- NTU/NIE alumni may utilise their $1,600 Alumni Course Credits. Click here for more information.
Electronics
| COURSE TITLE | ACADEMIC UNIT |
| CET757 Digital Integrated Circuit Design I | 1 |
| CET758 Digital Integrated Circuit Design II | 1 |
| CET759 Digital Integrated Circuit Design III | 1 |
| CET760 Advanced Topics in Semiconductor Devices I | 1 |
| CET761 Advanced Topics in Semiconductor Devices II | 1 |
| CET762 Advanced Topics in Semiconductor Devices III | 1 |
| CET763 Advanced Wafer Processing I | 1 |
| CET764 Advanced Wafer Processing II | 1 |
| CET766 Analog Integrated Circuit Design I | 1 |
| CET767 Analog Integrated Circuit Design II | 1 |
| CET768 Analog Integrated Circuit Design III | 1 |
| CET769 Integrated Circuit (IC) Packaging I | 1 |
| CET770 Integrated Circuit (IC) Packaging II | 1 |
| CET771 Integrated Circuit (IC) Packaging III | 1 |
Engineering Optics and Photonics
| COURSE TITLE | ACADEMIC UNIT |
| CET824 Basic Optical Engineering | 2 |
| CET825 Fibre Lasers for Various Industry Applications | 1 |
| CET826 Understanding Fibre Optic Distributed Network for IoT Infrastructure | 1 |
| CET827 Fibre based Components for High Speed IoT Applications | 1 |
| CET828 Understanding the Principles, Structures, Packaging, Installation and Signal Processing of Optical Fibre Sensing Technology | 1 |
| CET829 Engineering Metrology | 1 |
| CET830 Optical Fibre Design and Fabrication for High Power Laser and Telecommunication Applications | 1 |
| CET831Lasers and Optics for Smart Manufacturing (I 4.0)- Current Practices and Future Prospects | 1 |
| CET832 Laser Manufacturing Processes | 2 |
| CET833 Organic Light Emitting Diode Technology for Flat Panel Information Displays | 1 |
| CET834 Understanding of basic device structure and operating principles of displays and LEDs | 1 |
| CET835 Laser Machining and 3D Printing for Industry | 0.5 |
| CET836 Smart Optical Sensors for Smart Manufacturing | 0.5 |
| CET837 Bio-imaging | 1 |
Listed courses are:
- Credit-bearing and stackable to Graduate Certificate in Electronics, Graduate Certificate in Engineering Optics and Photonics (total 9AUs) and FlexiMasters in Electronics and FlexiMasters in Engineering Optics and Photonics (total 15AUs).
- SSG funded and SkillsFuture Credit approved.
